|
1. Glass wafer Spec 확정시 고려해야할 사항
1. Glass 종류 : Sodalime Glass , Corning1737( Egle200 Display용 Glass ),
Corning7740 (Pyrex,Borofloat33 Bonding용 또는 MEMS용 Glass) ,Tempax Glass
2. Size : 2” , 3” , 4” , 5” , 6” , 8” Dicing공정 추가로 원하시는 Square type도 가능
Egle2000에서 370mm * 470mm , 370mm*400mm등 다양
3. Thickness : 0.5T ( Corning 7740에서 가장 일반적 두께) , 0.63T ( Sodalime , Display용에서 가장 일반적 두께 ) ,
2.3T 등 원하시는 두께 다양
4. Surface Finished : Single Side Polished, Double Side Polished
5. Flat : 1flat 또는 Round로 고객 요구에 맞춰
6. Grade : UV Grade
2 . Glass 를 이용하여 가능한 공정
Metal Deposition by Sputtering or Evaporation
SiO2 or Si3N4 by PECVD (LPCVD는 불가)
Dicing을 이용한 원하시는 사이즈로 Cutting 가능
CMP를 이용한 원하시는 두께 조절 가능=> TTV최소 2um로 제작 가능
Sending
Patterning Process
Hole Process
Si 위에 Bonding Process
Patterning Process
PR Coating by Spin Coater (AZ1512, AZ1518 , DNR , AZ5214 등)
3. 각 Glass Data 보기 (필요하신 글라스를 클릭하세요)
Sodalime , Corning1737 ( egle2000 ) , Corning7740 (Pyrex, Borofloat33)
<Sodalime 글라스 특성표>
|
Property
|
|
Specific
Gravity
|
2.53
|
-
|
|
Modulus
of Elasticity (Young's)
|
7.2x1010
Pa
|
(10.4x106
psi)
|
|
Modulus
of Rigidity (Shear)
|
3.0x1010
Pa
|
(4.3
x 106 psi)
|
|
Bulk
Modulus
|
4.3x1010
Pa
|
(6.18
x 106 psi)
|
|
Poisson's
Ration
|
0.23
|
-
|
|
Density
|
2530
kg/m3 (2.47 g/cc)
|
(158
ib/ft3)
|
|
Coefficient
of Thermal Stress
|
0.62
mPa/° C
|
(50
psi/° F )
|
|
Thermal
Conductivity
|
0.937
W.m/m2 ° C
|
(6.5
btu.in/hr° F.ft2)
|
|
Specific
Heat
|
0.21
|
-
|
|
Coefficient
of Linear Expansion
|
8.9
x 10-6 strain/° C
|
(4.9
X 10-6 strain/° F)
|
|
Hardness
(Moh's Scale)
|
5
to 6
|
-
|
|
Refractive
Index (Sodium D line)
|
1.523
|
-
|
|
(1um)
|
1.511
|
-
|
|
(2um)
|
1.499
|
-
|
|
Softening
Point
|
1340
° F (726° C)
|
-
|
|
Annealing
Point
|
1015
° F (546° C)
|
-
|
|
Strain
Point
|
957
° F (473 ° C)
|
-
|
|
Emissivity
at 75 ° F
|
0.84
|
-
|
|
Loss
Tangent %
|
0.900
|
-
|
|
Volume
Resistivity ohm.cm 250° C
|
6.40
|
-
|
| Glass Name |
Working Temp |
Max Temp |
Thermalshock
Resistmc |
| Normal Sodalime |
220 |
250 |
170 |
| Pyrex |
430 |
490 |
304 |
Sodalime 글라스 특성보기
<egle2000 글라스 특성표>
Properties
|
Mechanical
|
Metric
|
English
|
|
Density(20℃,68℉)
|
2.54g/cm3
|
158.6lb/ft3
|
|
Young's
Modulus
|
7.14*103kg/mm2
|
10.15*106psi
|
|
Poisson's
Ratio
|
0.22
|
0.22
|
|
Shear
Modulus
|
2.88*103kg/mm2
|
4.1*106psi
|
|
Viscosity
|
|
WorkingPoint(104poises)
|
1312℃
|
2394℉
|
|
SofteningPoint(107.6
poises)
|
975℃
|
1787℉
|
|
Annealing
Point(1013poises)
|
721℃
|
1330℉
|
|
Strain
Point (1014.5 poises)
|
666℃
|
1231℉
|
|
Thermal
Expansion
|
|
Expansion
|
37.6*10-7/℃
|
21*10-7/℉
|
|
Room
Temperature to setting Point
|
42.0*10-7/℃
|
23.3*10-7/℉
|
|
Optical
|
|
Birefringence
Constant
|
333nm/cm
kg/mm2
|
-
|
|
Electrical
|
|
Log10 Volume Resistivity
|
(250℃,428℉)-13.5
|
(350℃.662℉)-11.4
|
|
-
|
(500℃,932℉)-9.3
|
-
|
Refractive
Index
|
Wavelength
(nm)
|
435.8
|
480
|
486.1
|
546.1
|
589.3
|
643.8
|
656.3
|
|
Index
of Refraction
|
1.529
|
1.525
|
1.5244
|
1.5207
|
1.5186
|
1.5166
|
1.516
|
egle2000 material information
Down
<Pyrex 특성표>
|
물리적 성질
|
|
Density(ρ)
|
@25°C
|
2.22
g/cm3
|
|
Young's
Modulus (E)
|
@25°C
|
63
GPa
|
|
Knoop
Hardness (HK 0.1/2.0)
|
per
ISO 9385
|
480
|
|
Poisson's
Ratio (μ)
|
-
|
0.20
|
|
Bending
Strength
|
per
DIN 52292
|
25
N/mm2
|
|
전기적 성질
|
|
Dielectric
Constant (κ)
|
1
Mhz @ 25°C
|
4.6
|
|
Dielectric
Loss Factor (tan δ)
|
1
Mhz @ 25°C
|
37
x 10-4
|
|
Dieletric Strength (κ′)
|
23°C
|
16kV/mm
|
|
149°C
|
7kV/mm
|
|
160°C
|
1.8kV/mm
|
|
Volume Resistivity (log ρ)
|
250°C
|
8.0
|
|
350°C
|
6.5
|
|
화학적 성질
|
|
Common
Reactants
|
Weight
Loss mg/cm2
|
|
0.02
n NaOH, 6 hr @ 95° C
|
0.16
|
|
0.02
n H2SO4, 24 hr @ 95° C
|
<
0.01
|
|
H2O,
24 hr @ 95° C
|
<
0.01
|
|
5%
NaOH, 6 hr @ 95° C
|
1.1
|
|
5%
HCl, 24 hr @ 95° C
|
<
0.01
|
|
0.02
Na2CO3, 6 hr @ 95° C
|
0.16
|
|
10%
HF, 20 min @ 23° C
|
1.1
|
|
10%
NH4F*HF, 20 min @ 23° C
|
0.14
|
|
Glass
Name
|
Working
Temp
|
Max
Temp
|
Thermalshock
Resistmc
|
|
Normal
Sodalime
|
220
|
250
|
170
|
|
Pyrex
|
430
|
490
|
304
|
Chemical Composition of Borofloat 33 and Pyrex (Corning7740)
|
SiO2
|
B2O3
|
Na2O3
|
K2O
|
Al2O3
|
|
Borofloat33
|
80
|
13
|
3.5
|
1
|
2.5
|
|
Pyrex
|
81
|
13
|
4
|
-
|
2
|
Physical Properties of Borofloat 33 and
Pyrex (Corning7740)
|
Properties
|
Borofloat33
|
Pyrex
|
|
Density(g/cm3)
|
2.2
|
2.2
|
|
Transformation
Temperature in ° C
|
525
|
528
|
|
Strain Point T
(log h=14.5)
|
619
|
-
|
|
Softening
Point T (log h=7.8)
|
820
|
-
|
|
Working Point
T (log h=4.0)
|
1270
|
1270
|
|
Maximum Use Temperature in ° C
Short term/Long Term
|
500/450
|
290/260
|
|
Transform
Temperature in ° C
|
630
|
-
|
|
Linear thermal
expansion Coefficient α in ° C
|
3.25 X 10E-8
|
3.25 X 10E-8
|
|
다른 Pyrex 특성표 보기
|
Borofloat33 자료 보기
|
|
|
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